Optical method for measuring structural parameters of island films

An optical method for determining characteristics of the submicron structur e in island films is proposed. The method is based on the measurements of f luctuations of optical properties of a film detected when a focused laser b eam is scanned over it. It is shown that the island size distribution can b e determined in principle by the method proposed. Structural inhomogeneity of a Cs film on sapphire is revealed experimentally. Parameters of these in homogeneities are measured as functions of the film thickness. The correspo ndence of the results of the optical method and the data of electron micros copy is tested for a In film on glass. (C) 2000 MAIK "Nauka/Interperiodica" .