A micromachined magnetic-field sensor based on an electron tunneling displacement transducer

Authors
DiLella, D Whitman, LJ Colton, RJ Kenny, TW Kaiser, WJ Vote, EC Podosek, JA Miller, LM
Citation
D. Dilella et al., A micromachined magnetic-field sensor based on an electron tunneling displacement transducer, SENS ACTU-A, 86(1-2), 2000, pp. 8-20
Citations number
34
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
86
Issue
1-2
Year of publication
2000
Pages
8 - 20
Database
ISI
SICI code
0924-4247(20001030)86:1-2<8:AMMSBO>2.0.ZU;2-F
Abstract
We describe a micromachined magnetic-field sensor that is based on an elect ron tunneling transducer. This tunnel sensor is small, very sensitive, oper ates at ambient temperature and requires very little power. The measured re solution of the sensor is 0.3 nT/root Hz at 1 Hz, The limiting resolution, calculated based on fundamental noise sources, is 0.002 nT/root Hz at 1 Hz. The dominant source of the observed noise in the present device is low fre quency air pressure fluctuations. (C) 2000 Published by Elsevier Science B. V.