Microfabrication of two layer structures of electrically isolated wires using self-assembly to guide the deposition of insulating organic polymer

The fabrication of two layer structures of electrically isolated wire - cro ssed wire structures and a surface coil inductor - is described. The fabric ation process utilizes the tools of soft lithography and incorporates two l evels of self-assembly. The use of microcontact printing and patterned self -assembly of liquid polymers removes the need for registration of the insul ating layer with the underlying layer as required in conventional lithograp hy techniques. The performance characteristics of the surface coil inductor are measured and closely resemble those predicted by theory. (C) 2000 Else vier Science B.V. All rights reserved.