Cross-talk simulation in CMOS micromachined gas-sensors with electrothermal actuation

Citation
A. Roncaglia et al., Cross-talk simulation in CMOS micromachined gas-sensors with electrothermal actuation, SENS ACTU-B, 69(3), 2000, pp. 320-324
Citations number
4
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS B-CHEMICAL
ISSN journal
09254005 → ACNP
Volume
69
Issue
3
Year of publication
2000
Pages
320 - 324
Database
ISI
SICI code
0925-4005(20001025)69:3<320:CSICMG>2.0.ZU;2-L
Abstract
This paper reports about a device-level simulation of the capacitive crosst alk between the actuators and the sensing elements of a resonant-cantilever gas-sensor based on CMOS technology. The results are exploited to propose some improvements in the device design. (C) 2000 Elsevier Science S.A. All rights reserved.