A simple and reliable system for in situ deposition of large-area double-sided, superconducting films

The design and realization of a simple and reliable convertible diode/magne tron deposition system allowing the in situ production of both high-T-c sup erconducting oxide films and low-T-c superconducting metallic films is pres ented. The ability to produce high-quality double-sided in situ films with uniform characteristics over 2 " diameter targets is demonstrated. This app aratus can represent a valid alternative to more sophisticated, less flexib le deposition systems and is well suited for application in the large-scale production of superconducting filters for wireless communications.