Deposition and characterization of PMNT thin films

The system Pb[(Mg1/3Nb2/3)(0.90)Ti-0.03]O-3 (PMNT) is classified as a relax er ferroelectric material, paraelectric at room temperature. Ceramics of th is compound were used as targets to produce thin films by pulsed laser depo sition (PLD). A KrF excimer laser with lambda = 248 nm, a fluence of 2 J/cm (2) and 10 Hz repetition rate was used for the deposits on TiN/SiO2/Si(100) substrates. Well adhered and uniform thickness films were obtained showing no evidence of as-deposited crystallinity, X-Ray Diffraction studies showe d the development of microcrystalline structure with annealing starting at 500 degreesC, evidenced also by scanning electron microscopy (SEM). Finally , a correlation between the measured dielectric properties of the films and their microstructure is made. (C) 2000 Elsevier Science S.A. All rights re served.