Tungsten carbide (WC) hard coatings have been obtained on steel substrates
by an r.f. magnetron sputtering process. Two-layer coatings have been depos
ited in order to improve the adhesion on steel. The lower layer was tungste
n metal and the upper WC layer was obtained by reactive sputtering of the t
ungsten target in an Ar and methane gas mixture. AES and SIMS confirmed tha
t the WC layer composition depends on the reactive sputtering gas compositi
on. Film microhardness was measured by microindentation, and the coating ad
hesion by microscratch. Measurement results showed that high hardness coati
ngs can be prepared at a relatively low temperature and that good adhesion
on steel is achieved with the two-layer coating. Nanowear measurements show
ed a noticeable dependence of this applied functional property on the coati
ng compositions. (C) 2000 Elsevier Science S.A. All rights reserved.