Light coupling into a sub-micrometer-thick waveguide is usually done throug
h a grating coupler. Coupling efficiency is strongly enhanced by addition o
f a mirror above the grating. This new kind of coupler can be designed to a
chieve efficiencies as great as 80%. Numerical calculations for a high-angu
lar-spread Gaussian incident beam are compared with experimental results ob
tained for a standard silicon-on-insulator waveguide. (C) 2000 Optical Soci
ety of America. OCIS codes: 310.2790, 230.7390, 230.1950.