Scattering characteristics of multilayer fluoride coatings for 193 nn depos
ited by ion beam sputtering and the related interfacial roughnesses are inv
estigated. Quarter- and half-wave stacks of MgF2 and LaF3 with increasing t
hickness are deposited onto CaF2 and fused silica and are systematically ch
aracterized. Roughness measurements carried out by atomic force microscopy
reveal the evolution of the power spectral densities of the interfaces with
coating thickness. Backward-scattering measurements are presented, and the
results are compared with theoretical predictions that use different model
s for the statistical correlation of interfacial roughnesses. (C) 2000 Opti
cal Society of America OCIS codes: 310.6860, 290.5820, 180.5810, 140.7240.