BONDING ORGANIC-MOLECULES TO HYDROGEN-TERMINATED SILICON-WAFERS

A platinum catalyzed hydrosilation reaction between 3,4,-dichlorobuten e and the hydrogen-terminated (100) Si surface was used to bond dichlo robutane molecules to silicon wafers treated with dilute HF acid. In s itu infrared, x-ray photoelectron spectroscopy, and time-of flight sec ondary ion mass spectroscopy were used to characterize the modified si licon surfaces. The results from this investigation indicate that 3,4, -dichlorobutene reacts with surface silicon hydride groups to yield 3, 4,-dichlorobutane, which bonds to the surface via Si-C bonds. This wor k demonstrates that organic molecules can be selectively patterned ont o hydrogen-terminated silicon wafers using standard microelectronic pa tterning methods.