ETCH-STOP TECHNIQUES FOR MICROMACHINING

Authors
COLLINS SD
Citation
Sd. Collins, ETCH-STOP TECHNIQUES FOR MICROMACHINING, Journal of the Electrochemical Society, 144(6), 1997, pp. 2242-2262
Citations number
382
Categorie Soggetti
Electrochemistry
Journal title
Journal of the Electrochemical Society → ACNP
ISSN journal
00134651
Volume
144
Issue
6
Year of publication
1997
Pages
2242 - 2262
Database
ISI
SICI code
0013-4651(1997)144:6<2242:ETFM>2.0.ZU;2-E
Abstract
A presentation of etch stop engineering is presented with a review of the present state of the art in etch stop micromachining. This review assumes a global definition for an etch stop and focuses on salient ex amples of common etch stop techniques, as well as unique and/or novel etch stop methods. A table of representative etch stops is also presen ted as a summary.