K-band 3-bit low-loss distributed MEMS phase shifter

In this letter, we present a 3-bit K-band distributed phase shifter circuit that employs microelectromechanical systems (MEMS) capacitive switches, Th e measured results demonstrate an average 1.7 dB insertion loss at 26 GHz w ith return loss better than -7 dB, Insertion phase shifts of all switching states are measured and show phase error less than 8.5 degrees for all stat es, The low loss K-band 3-bit phase shifter demonstrated in this letter can potentially be extended to more-bit-controlled phase shifter applications.