T. Corman et al., "Burst" technology with feedback-loop control for capacitive detection andelectrostatic excitation of resonant silicon sensors, IEEE DEVICE, 47(11), 2000, pp. 2228-2235
A method for excitation and detection of resonant silicon sensors based on
discontinuous, "burst" excitation is presented. The solution eliminates the
crosstalk between electrostatic excitation and capacitive detection by sep
arating them in time. High excitation voltages can be combined with highly
sensitive detection electronics. The method facilitates the use of large di
stances between the resonator and electrodes used for elicitation and detec
tion. The method was successfully tested with feedback-loop control on sili
con resonant density and pressure sensors where the electrodes were positio
ned outside a glass, Continuous measurements of gas pressures and liquid de
nsities were realized, The simplified fabrication process utilized reduces
the risk of leakage from the ambient pressure to the low-pressure cavities
in which the resonators are encapsulated since electrical feedthroughs are
not needed, Excitation voltages alternating between 0 and 150 V could be ap
plied to the resonators with measured electronics sensitivities of 0.4 fF S
ignal-to-noise ratios (SNRs) as high as 100 (density sensor) and 360 (press
ure sensor) were obtained. The electronic evaluation revealed that the "bur
st" duty cycle (i.e,, the excitation time relative to the free oscillation
time) had a strong influence on the output detection voltage, As few as two
excitation periods with a "burst" cycle frequency of 115 Hz and a "burst"
duty cycle of 1% was sufficient to select and lock the resonance frequency
(28 042 Hz) for the tested pressure sensor. The same electrodes could be us
ed for both excitation and detection, A novel solution is also presented th
at eliminates the charging effect of dielectric surfaces which otherwise ca
n be a problem for capacitive detection.