Preparation of Pb(Zr, Ti)O-3 thin films on glass substrates

Lead-zirconate-titanate (PZT) thin films were prepared on non-alkaline glas s substrates widely used in liquid crystal display (LCD) devices, by plasma -assisted magnetron RF sputtering with an immersed coil. After preparation of the PZT thin film, the glass was available for use in LCD device process ing. No mutual diffusion of the elements was recognized between the glass s ubstrate and the bottom electrode. The PZT layer had a dense film structure with rectangular and columnar grains, and only its perovskite phase was cr ystalline. PZT thin films on a glass substrate had leakage current densitie s of about 10(-8) A/cm(2), acceptable hysteresis loop shapes with the reman ent polarization. (P-r) of 45 muC/cm(2) and the coercive field (E-c) of 90 kV/cm. Ferroelectric properties on a glass substrate almost conform with th ose on a Si-based substrate.