Ferroelectric properties of Al-doped lead titanate zirconate thin films prepared by chemical solution deposition process

2.5 and 5 mol% Al were doped to lead titanate zirconate (PZT) thin films us ing a chemical solution deposition process, and ferroelectric properties of Al-doped PZT thin films were compared with those of nondoped PZT film. Dop ed Al seems to be substituted at the Zr/Ti site (B site) since the c/a rati o decreased with increasing Al content. The shape of a P-E hysteresis curve of the thin films did not show remarkable differences between nondoped and Al-doped PZT. Values of P-s, P, and E-c of the 2.5 mol% Al-doped PZT thin films were about 43 muC/cm(2), 19 muC/cm(2) and 58 kV/cm, respectively. On the other hand, the leakage current of the thin films showed a tendency to decrease with increasing Al content. The fatigue properties of the Al-doped PZT thin film showed a slight improvement, because the reduction rate of t he fatigue was smaller than that of a nondoped PZT thin film.