Influence of La0.5Sr0.5CoO3 heterostructure electrodes on Pb(Zr,Ti)O-3 thin film properties

The effect of multiple-layer bottom electrodes including a La0.5Sr0.5CoO3 ( LSCO) layer on the ferroelectric and electric fatigue properties of the PbZ r0.5Ti0.5O3 (PZT 50/50) thin film capacitor was investigated. Conductive LS CO thin films consisting of fine perovskite grains can be obtained at relat ively low temperatures (400 degreesC) by magnetron sputtering of the cerami c LSCO target. It is found that PZT capacitors having heterostructure elect rodes such as Pt/PZT/LSCO/SiO2/Si and Pt/PZT/LSCO/Pt/Ti/SiO2/Si exhibit asy mmetric hysteresis loops. These asymmetric capacitors also show fairly good fatigue endurance. Dependence of fatigue on the applied voltage will also be described.