M. Lebedev et al., Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method, JPN J A P 1, 39(9B), 2000, pp. 5600-5603
The results of the direct deposition of lead zirconate titanate [Pb(Zr-0.52
, Ti-0.48)O-3] (PZT) thick film on a Si-based structure are presented. The
construction of a bottom electrode is very important for successful deposit
ion. The actuation properties of PZT on the Si membrane were investigated.
For a 6.2 x 6.1 mm(2), 65-mum-thick Si membrane driven by a 4.7 x 4.3 mm(2)
, 13-mum-thick PZT layer, the deflections, which were 1.5 mum upon applying
52 V at nonresonance frequency and 22 mum upon applying 8 V at resonance f
requency, were measured.