Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method

The results of the direct deposition of lead zirconate titanate [Pb(Zr-0.52 , Ti-0.48)O-3] (PZT) thick film on a Si-based structure are presented. The construction of a bottom electrode is very important for successful deposit ion. The actuation properties of PZT on the Si membrane were investigated. For a 6.2 x 6.1 mm(2), 65-mum-thick Si membrane driven by a 4.7 x 4.3 mm(2) , 13-mum-thick PZT layer, the deflections, which were 1.5 mum upon applying 52 V at nonresonance frequency and 22 mum upon applying 8 V at resonance f requency, were measured.