A new nondestructive evaluation method for surface acoustic wave velocity

A new nondestructive evaluation method for surface acoustic wave (SAW) velo city on a piezoelectric wafer was proposed. Split electrodes were formed on a glass wafer and a nonconductive liquid was interposed between the piezoe lectric wafer and the glass wafer. The mode of the SAW excited on the piezo electric wafer surface was leaky (LSAW) and its velocity was evaluated usin g the electrical reflection characteristics of the split electrodes. The us efulness of the new method was experimentally proven by showing the high re producibility of the measured velocity and the agreement between the measur ed and calculated values indicating the SAW characteristics on a rotated-Y langasite wafer.