Evaluation of the disadvantage of radio frequency plasma treatment on polymer using equivalent circuit model of capacitor

The surface modification by plasma treatment is recently preferred to impro ve adhesion of metal on polymer. However, it may degrade the electrical or dielectric properties. To verify the drawbacks of surface modification, we compared biphenyldianhydride phenylenediamine (BPDA-PDA) polyimide after ra dio frequency (RF) Ar plasma treatments with as-baked polyimide. The confir mation of degrading the electrical properties of which surface is modified was attempted by means of equivalent circuit model of capacitor. Judging fr om that theory, we hypothesized that the electrical degradation can be easi ly checked out only by measuring resonance frequency. Capacitor before RF A r plasma treatments showed the resonance frequency of 40.5 MHz (estimated). RF Ar plasma treatments for improving adhesion of metal on polyimide, howe ver: lowered resonance frequency of polyimide to 34-35 MHz. From X-ray phot oelectron spectroscopy (XPS) analysis, we certified that the degradation of electrical properties is derived out from the accumulated carbon atoms on the destroyed surface of polyimide layer. We deduced that although plasma t reatments definitely did not affect the bulk dielectric constant of polyimi de, it degraded the electrical properties of polyimide by lowering resonanc e frequency. Consequently, just measuring resonance frequency of capacitor can estimate the degradation of the electrical properties.