F. Takeda et al., Composition control of NiTi shape memory alloy films formed by sputter deposition with a composite target, JPN J A P 1, 39(10), 2000, pp. 5992-5994
In order to obtain NiTi films by magnetron sputtering, the authors devised
a target composed of Ti and Ni rings and a Ti disk. The fabricated films we
re analyzed by energy-dispersive X-ray analysis (EDX) and Rutherford backsc
attering spectrometry (RBS). X-ray diffraction measurements (XRD) of the fi
lms were also carried out. It was shown that the composition of the film fo
rmed with the target was easily controlled with an accuracy of 0.5 at.% by
changing the electric current flowing through the solenoid coil of an elect
romagnet. The composition of the film was affected by the Ar gas pressure,
It was also shown that a film with an in-depth composition gradient was eas
ily formed. The obtained films were confirmed by a bending test to show the
shape memory effect.