An improved method has been developed to analyze the metallic contaminants
in the non-volatile residue of liquid-phase tungsten hexafluoride (WF6). Th
is method uses a mixture of aqueous ammonia, aqueous hydrofluoric acid and
aqueous nitric acid to dissolve the non-volatile residue, left behind when
liquid-phase WF6 is evaporated. The use of this aggressive mixture is much
superior to the use of deionized water or aqueous ammonia, as has been the
practice in the past. Using this aggressive matrix on the residue from a 22
0 g aliquot of WF6, and analyzing the solution using a quadrupole-based ICP
-MS instrument equipped with an inert sample introduction system, the follo
wing limits of detection are obtained: Na 0.5; K 1.3; Fe 0.8; Cr 0.7; Th 0.
01; and U 0.01 ng g(-1) WF6.