The energy distribution of electrons that were transported through a thin i
ntrinsic AlN film was directly measured as a function of the applied field.
The measurements were realized by extracting the electrons into vacuum thr
ough a semitransparent Au contact and measuring their energies using an ele
ctron spectrometer. At moderate applied fields (100 kV/cm), the energy dist
ribution was found to follow a Maxwellian model corresponding to a temperat
ure of 2700 K and a drift component below the spectrometer resolution. At h
igher fields, intervalley scattering was evidenced by the presence of a sec
ond peak at 0.7 eV. This coincides well with the energy position of the LM
valleys in AlN. (C) 2000 American Institute of Physics. [S0021-8979(00)0912
2-2].