Influence of annealing temperature on ferroelectric properties of SrBi2Ta2O9 thin films prepared by off-axis radio frequency magnetron sputtering

Ferroelectric SrBi2Ta2O9 (SBT) thin films were deposited on Pt/TiOx/SiO2/Si substrates using the off-axis radio frequency magnetron sputtering techniq ue. X-ray diffraction and atomic force microscopy experiments showed that t he crystallization of SBT thin films at > 700 degreesC correlated with the formation of rod-like grains. Cross-sectional field emission scanning elect ron microscopy images revealed that the apparent thickness of SBT decreased while the thickness of Pt increased as the annealing temperature was incre ased. The apparent decrease in the thickness of SBT was attributed to cryst allization and densification in the film whereas the apparent increase in P t thickness was due to diffusion of Ti and Bi into the Pt layer. This diffu sion at high annealing temperatures (800 degreesC and above) alters the Pt purity and degrades the Pt as the bottom electrode for the ferroelectric ca pacitor. Good insulating properties were obtained when the SBT film was ann ealed at 700 and 750 degreesC whereas higher leakage currents were observed at annealing temperatures > 800 degreesC. A remnant polarization (P-r) of 4.35 muC/cm(2) and coercive field (E-c) of 31.5 kV/cm were obtained for the SBT thin film annealed at 750 degreesC with a leakage current density of < 10(-7) A/cm(2). (C) 2000 American Institute of Physics. [S0021-8979(00)073 22-9].