Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition

Aligned multiwall carbon nanotubes have been grown on silicon substrates by microwave plasma enhanced chemical vapor deposition using methane/ammonia mixtures. Scanning electron microscopy shows that the nanotubes are well al igned with high aspect ratio and growth direction normal to the substrate. Transmission electron microscopy reveals that the majority phase has a bamb oo-like structure. Data are also presented showing process variable effects on the size and microstructure of the aligned nanotubes, giving insight in to possible nucleation and growth mechanisms for the process. (C) 2000 Amer ican Institute of Physics. [S0021-8979(00)04923-9].