Simulation of a diamond-shaped target with different sizes in plasma basedion implantation

In this paper, plasma based ion implantation of a diamond-shaped target was simulated using a fluid dynamic model for three different sizes. The effec ts of the target size on plasma sheath evolution and the implanted ion para meters have been studied. It was found that a larger sized target would res ult in a faster sheath expansion, and better conformity between the sheath and the target. For all three cases, the ion implanting dose peaked near th e corner and decreased at the corner, reminiscent of the sheath characteris tic around an independent corner.