CONTINUOUS YBA2CU3O7-DELTA FILM DEPOSITION BY OPTICALLY CONTROLLED REACTIVE THERMAL COEVAPORATION

We built a thermal co-evaporation system to deposit YBCO films on larg e areas in a continuous process which requires some basic modification s to the established standard co-evaporation setup, An optical rate co ntrol system based on atomic absorption spectroscopy has been develope d to measure the indiviual metal fluxes. In addition the metal sources can be reloaded in-situ for long times, The performance of these new components is discussed and results of first YBCO films grown on small samples are shown.