M. Lorenz et al., LARGE-AREA AND DOUBLE-SIDED PULSED-LASER DEPOSITION OF Y-BA-CU-O THIN-FILMS APPLIED TO HTSC MICROWAVE DEVICES, IEEE transactions on applied superconductivity, 7(2), 1997, pp. 1240-1243
Pulsed laser deposition (PLD) of YBa2Cu3O7-x (YBCO) thin films on both
sides of 3-inch diameter sapphire wafers and LaAlO3 (LAG) cylinder su
bstrates, respectively, is a basic and flexible technique in order to
optimize microwave bandpass filters for wireless communication systems
. The large-area and double-side PLD technique allows homogeneous and
reproducible YBCO deposition on both substrate sides with inductively
measured critical current densities j(c) of 3 x 10(6) to 5 x 10(6) A/c
m(2) at 77 K with a YBCO thickness of 350 nm to 600 nm. Selected resul
ts of compositional, structural, electrical, and microwave characteriz
ation of the PLD-YBCO films are reported.