Use of microcontact printing for generating selectively grown films of poly(p-phenylene vinylene) and parylenes prepared by chemical vapor deposition

Several non-photolithographic methods for growing patterned films of paryle ne-based polymers prepared by chemical vapor deposition are presented. Thes e patterns were generated using transition metals and metal salts known to inhibit polymer deposition, in combination with alkanethiols deposited by m icrocontact printing. By patterning the alkanethiols on gold or silver surf aces, well-defined selectively grown structures of vapor-deposited parylene -N and parylene-C were realized, with lateral dimensions ranging from 1.5 t o 35 mum. Using carboxylic acid terminated alkanethiols deposited by microc ontact printing to define regions of iron salt exposure on the surface, sel ectively grown films of poly(p-phenylene vinylene) were generated, with fea tures having lateral dimensions of 12.5 mum separated by 2.5 mum, and thick nesses of 750 Angstrom. The structures fabricated with this approach have d imensions relevant to applications in microelectromechanical systems and po lymer-based displays.