Sr2RuO4 is the only known layered perovskite that is free of copper, y
et superconducting. Its low metallic resistivity and excellent lattice
match with YBa2Cu3O7-delta make it an attractive candidate for use as
conductive electrodes to YBa2Cu3O7-delta-based superconducting device
s or as a normal metal in YBa2Cu3O7-delta-based SNS junctions, We have
determined optimal deposition conditions for growth of single-domain
epitaxial films of Sr2RuO4, Films with excellent crystallinity are rea
dily grown at substrate temperatures exceeding 1000 degrees C at low p
ressures, At lower temperatures and higher pressures, films predominan
tly consist of the SrRuO3 phase, Resistivity versus temperature measur
ements reveal that the as-grown Sr2RuO4 films are metallic, but not su
perconducting. Epitaxial YBa2Cu3O7-delta/Sr2RuO4 heterostructures have
also been grown, X-ray and resistivity measurements show that the YBa
2Cu3O7-delta films are of high quality.