ON-AXIS SPUTTER-DEPOSITION OF SR2ALTAO6 DIELECTRIC THIN-FILMS FOR MULTILAYER Y-BA-CU-O CIRCUITS

Sr2AlTaO6(SAT) is a desirable dielectric for use in YBCO multilayer ci rcuits due to the close lattice match to YBa2Cu3O7(YBCO), and low diel ectric constant, SAT thin films have been deposited using on axis rf m agnetron sputtering. Epitaxial growth of SAT has been measured using x -ray diffraction, The electrical isolation of SAT sandwiched between t wo YBCO layers, and the superconducting critical current of YBCO depos ited over SAT crossover structures are measured.