A Campargue-type source of an intense, triply differentially pumped superso
nic beam of atoms (He, Ne, Ar) and molecules (N-2) for use in high-resoluti
on collision experiments is described. Using stagnation pressures of (1-10)
bar, nozzle diameters of (0.05-0.25) mm, and skimmer diameters of (0.5-1.0
) mm, the center-line intensity and collimated target density are quantitat
ively characterized by electron impact ionization in conjunction with total
ion collection. Optimum densities in a target plane, located about 160 mm
from the nozzle, range from 10(12) cm(-3) (N-2) to 8x10(12) cm(-3) (He) at
background densities which are about 1% of the beam densities. The results
are compared with values calculated for ideal supersonic expansions. (C) 20
00 American Institute of Physics. [S0034-6748(00)05011-5].