Static and dynamic calibration of thin-film thermocouples by means of a laser modulation technique

This article presents static and dynamic calibration methods of thin-film t hermocouples (TFTCs) by means of a laser modulation technique. The static c alibration is based on a combined analysis of theoretical and experimental results; knowing the experimental parameters (incident laser power, beam wa ist radius), the temperature of the exposed junction is theoretically calcu lated using a thermal model and the sensor electromotive force (emf) respon se is recorded. The ratio between the sensor emf and the corresponding temp erature gives the TFTC sensitivity. The periodic method is used to determin e both the frequency response and the 95% response time of the TFTC. Specia l test patterns with integrated Au/Pd thin-film thermocouples are developed and tested by these methods. Results of Au/Pd TFTC sensitivity are compare d to the literature values and a good agreement is obtained. (C) 2000 Ameri can Institute of Physics. [S0034-6748(00)02410-2].