Production technology of large-area multicrystalline silicon solar cells

Authors
Fujii, S Fukawa, Y Takahashi, H Inomata, Y Okada, K Fukui, K Shirasawa, K
Citation
S. Fujii et al., Production technology of large-area multicrystalline silicon solar cells, SOL EN MAT, 65(1-4), 2001, pp. 269-275
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
SOLAR ENERGY MATERIALS AND SOLAR CELLS
ISSN journal
09270248 → ACNP
Volume
65
Issue
1-4
Year of publication
2001
Pages
269 - 275
Database
ISI
SICI code
0927-0248(200101)65:1-4<269:PTOLMS>2.0.ZU;2-X
Abstract
In 1996 a conversion efficiency of 17.1% had been obtained on 15 cm x 15 cm me-Si solar cell. In this paper, large-scale production technology of the high-efficiency processing will be discussed. Enlarging reactive ion etchin g (RIE) equipment size, technology of passivation, and fine contact grid wi th low resistance by screenprinted metallization, which is firing through P ECVD SiN, have been investigated. (C) 2001 Published by Elsevier Science B. V. All rights reserved.