The collector-emitter offset voltage of GaInP/GaAs HBTs grown by chemical-b
eam epitaxy with reduced toxicity precursors is investigated for Ni/Ge/Au/T
i/Au and Ti/Pt/Au collector contact metals. The offset voltage for HBTs wit
h Ti/Pt/Au collector metal is increased by 0.26 V compared to Ni/Ge/Au/Ti/A
u due to the 0.26 eV barrier existing between the n-GaAs subcollector and t
he Ti/Pt/Au contact metal. Other parameters affected by the collector conta
ct barrier and impacting transistor performance include DC gain, microwave
and power performance. (C) 2000 Elsevier Science Ltd. All rights reserved.