Algorithm for analysis of low-energy-resolution REELS; determination of inelastic electron scattering cross-sections and applications in quantitativeXPS
S. Tougaard, Algorithm for analysis of low-energy-resolution REELS; determination of inelastic electron scattering cross-sections and applications in quantitativeXPS, SURF SCI, 464(2-3), 2000, pp. 233-239
We present a simple algorithm for separation of elastic and inelastic elect
rons in low-energy-resolution REELS and for subsequent determination of the
differential inelastic electron scattering cross-section. The application
of the determined cross-sections for quantitative surface analysis and back
ground correction with XPS is discussed. (C) 2000 Elsevier Science B.V. All
rights reserved.