Investigations of Fuch-Kliewer phonons and hydrogen adsorption of 6H-SiC surfaces by high-resolution electron-energy-loss spectroscopy

Citation
Jw. Liu et al., Investigations of Fuch-Kliewer phonons and hydrogen adsorption of 6H-SiC surfaces by high-resolution electron-energy-loss spectroscopy, THIN SOL FI, 375(1-2), 2000, pp. 77-81
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
375
Issue
1-2
Year of publication
2000
Pages
77 - 81
Database
ISI
SICI code
0040-6090(20001031)375:1-2<77:IOFPAH>2.0.ZU;2-S
Abstract
In this contribution, the optical Fuchs-Kliewer (FK) surface phonon and hyd rogen adsorption of 6H-SiC surfaces were investigated with high-resolution electron-energy-loss spectroscopy (HREELS). The different HREEL spectra of the FK surface phonons were obtained from clean (0001) Si- and (0001) C-ter minated surfaces. It was noticed that the full width at half maximum of ela stic peaks for the reconstructed surfaces was smaller than that of unrecons tructed surfaces for both (0001) Si- and (0001) C-terminated 6H-SiC. Under decomposing ammonia by hot filament at 1700 degreesC, only the adsorption o f hydrogen atoms on the surfaces for both Si- and C-terminated 6H-SiC was d etected in the experiment. (C) 2000 Elsevier Science S.A. All rights reserv ed.