Investigations of Fuch-Kliewer phonons and hydrogen adsorption of 6H-SiC surfaces by high-resolution electron-energy-loss spectroscopy

In this contribution, the optical Fuchs-Kliewer (FK) surface phonon and hyd rogen adsorption of 6H-SiC surfaces were investigated with high-resolution electron-energy-loss spectroscopy (HREELS). The different HREEL spectra of the FK surface phonons were obtained from clean (0001) Si- and (0001) C-ter minated surfaces. It was noticed that the full width at half maximum of ela stic peaks for the reconstructed surfaces was smaller than that of unrecons tructed surfaces for both (0001) Si- and (0001) C-terminated 6H-SiC. Under decomposing ammonia by hot filament at 1700 degreesC, only the adsorption o f hydrogen atoms on the surfaces for both Si- and C-terminated 6H-SiC was d etected in the experiment. (C) 2000 Elsevier Science S.A. All rights reserv ed.