The dielectric properties of (Ba0.5Sr0.5)TiO3 (BST) thin films with high el
ectrical resistivity were investigated. BST films are deposited on Pt/TiO2/
SiO2/Si substrates by a metal-organic deposition (MOD) method. The dielectr
ic permittivity and ac conductivity of the films are measured in the freque
ncy range 102-105 Hz. The dielectric permittivity epsilon (r) decreases sli
ghtly with frequency f, following the relationship epsilon (r) = a + bf(n-1
) (a, b and n are constants, n < 1). The ac conductivity <sigma>(f) increas
es with frequency as sigma>(*) over bar * (f) similar to f(n). These result
s indicate that the phonon-assisted jumps of electrons between localized st
ates play an important role in the dielectric properties of BST thin films.
The dielectric permittivity and ac conductivity of the BST thin films incr
ease with grain size, and decrease with increasing temperature. A prelimina
ry explanation is given. (C) 2000 Elsevier Science S.A. All rights reserved
.