Electrodeposition of diamond-like amorphous carbon films on Si from N,N-dimethylformamide

Diamond-like carbon (DLC) films were deposited on an Si plate from N, N-dim ethylformamide (DMF) with pulse-modulated power. The deposition process can be facilitated by the promotion of the temperature or the decrease of the electrode separation distance. The films were characterized by X-ray photoe lectron spectroscopy (XPS), Fourier transform infrared (FTIR) spectroscopy and Raman spectroscopy, respectively. The results showed that the films wer e hydrogenated DLC films. Hydrogen was removed and the primary bonding in t he films changed gradually from sp(3)-bonded carbon to sp(2)-bonded carbon as annealing proceeded. (C) 2000 Elsevier Science B.V. All rights reserved.