SYNTHESES, STRUCTURES, AND THERMAL-BEHAVIOR OF CU(HFACAC) COMPLEXES DERIVED FROM ETHANOLAMINES

A series of novel precursors for MOCVD of metallic copper have been sy nthesized and structurally characterized. These precursors are compose d of Cu(hfacac)(2), which serves as a volatile source of Cu, and amino alcohols, which act as reductants and anchor firmly to the copper cen ter through the amine unit. In some cases, a proton transfer from the coordinated alcohol to the hfacac ligand results in the formation of a n alkoxide unit and the release of the free Hhfacac. Metallic copper f ilms can be deposited by MOCVD at 300 degrees C without any external r eductant. Crystal data: Cu(hfacac)(2) . C7H8 (-103 degrees C), a = 6.5 10(6) Angstrom, b = 8.594(7) Angstrom, c = 18.478(15) Angstrom, orthor hombic space group Pmnn, Z = 2; Cu(hfacac)(2)(H2NCH2CH2OH) (-158 degre es C), a = 13.145(1) Angstrom, b = 13.418(1) Angstrom, c = 11.245(1) A ngstrom, alpha = 110.39(1)degrees, beta = 99.12(1)degrees, gamma = 97. 90(1)degrees, triclinic space group <P(1)over bar>, Z = 4; [Cu(hfacac) (Me2NCH2CH2O)](2) (-153 degrees C), a = 9.259(2) Angstrom, b = 12.011( 3) Angstrom, c = 6.304(1) Angstrom, a 91.19(1)degrees, beta = 106.66(1 )degrees, gamma = 74.83(1)degrees, triclinic space group <P(1)over bar >, Z = 1; Cu(hfacac)[N(CH2CH2OH)(2)(CH2CH2O)]. MeOH (-168 degrees C), a = 10.075(4) Angstrom, b = 8.611(4) Angstrom, c = 19.259(9) Angstrom, beta = 99.82(2)degrees, monoclinic space group P2(1)/m, Z = 4.