RING ETCHING ZONES ON MAGNETRON SPUTTERING TARGETS

A practical and theoretical investigation into a method for estimating the forms and dimensions of etching zones on magnetron sputtering tar gets is presented. This estimation is based on detailed geometry consi derations of the internal arrangement of the vacuum chamber and the sp uttering parameters. It is proved theoretically and experimentally tha t etching zones on sputtering targets are in a ring shape and that the ir location and dimensions are independent on the target material or d imensions. (C) 1997 Elsevier Science S.A.