The influence of the thickness of CVD diamond coatings on the adhesion
to a substrate, after cooling down from deposition temperature to roo
m temperature, has been studied experimentally and theoretically. Diam
ond layers have been deposited at 850 degrees C on W substrates by mic
rowave plasma enhanced CVD. Cooling down of the substrate-diamond coat
ing system to room temperature induces thermal stresses, due to differ
ent thermal expansion coefficients of coating and substrate. For thick
diamond coatings a total and sudden delamination could be observed as
a consequence of these stresses. On the contrary thin coatings, produ
ced under identical circumstances, adhered well. These phenomena have
been modelled and explained by the use of an energetic criterion for t
he delamination of a two-layer system under thermal stress. From the m
odel a critical thickness of the coating can be calculated. Above this
critical thickness, delamination will suddenly occur. The calculation
s also predict that for intermediate coating thicknesses delamination
can easily be induced by external causes. (C) 1997 Elsevier Science S.
A.