Acoustic streaming in micromachined flexural plate wave devices: Numericalsimulation and experimental verification

This paper presents the numerical simulation and experimental validation of acoustic streaming in micromachined flexural plate wave (FPW) devices. Two -dimensional and three-dimensional models of two device types were consider ed: the classical device with parallel interdigitated electrodes and the fo cused device with curved electrodes. Influences of different parameters oil the time-averaged velocity were investigated. Thermal transport effects of the acoustic streaming were also considered. We observed the amplifying ef fect of the streaming in the second type numerically and experimentally. To verify simulation results, the method of the particle image velocimetry (P IV) was applied in the experimental investigation.