This paper characterises the ability of graded composition Si1-xGex/Si bila
yers to bend MeV proton beams through small angles. The graded germanium ep
ilayer composition results in off-normal lattice directions of the epilayer
being gradually bent, so channeled protons are gently deflected away from
their initial direction. The relationship between the incident beam energy,
bilayer tilt angle, emergent angle and bending efficiency for 3, 5 and 10
MeV protons are simulated using a Monte Carlo channeling code and studied e
xperimentally using the Utrecht magnetic spectrometer. A maximum bending ef
ficiency of 35% of those protons, which are channeled at the front surface
of the epilayer is measured with the bilayer in a reverse geometry, and goo
d agreement with simulated results is demonstrated. These results are used
to predict the bending behaviour at higher beam energies and the relevant o
ptimum layer characteristics. (C) 2000 Elsevier Science B.V. All rights res
erved.