Epitaxial nanoscale [001] films of NixAl100-x (x = 52.5) have been prepared
by physical vapour deposition on to a thin him of Ag [001] on NaCl (001) f
aces with occasional hillocks. The Ag film contains numerous dislocations a
nd stacking faults and has a rms surface roughness of 2 nm. The Ni-Al film
is ordered in the B2 structure and reveals many dislocations as well as ant
iphase boundaries between ordered domains. The formation of subgrains in th
e Ni-Al film results in severe height variations up to 30 nm across the sur
face. A cross-sectional model for the growth of both films is presented.