Nonlinear vertical oscillations of a particle in a sheath of a rf discharge

Citation
Av. Ivlev et al., Nonlinear vertical oscillations of a particle in a sheath of a rf discharge, PHYS REV L, 85(19), 2000, pp. 4060-4063
Citations number
12
Categorie Soggetti
Physics
Journal title
PHYSICAL REVIEW LETTERS
ISSN journal
00319007 → ACNP
Volume
85
Issue
19
Year of publication
2000
Pages
4060 - 4063
Database
ISI
SICI code
0031-9007(20001106)85:19<4060:NVOOAP>2.0.ZU;2-M
Abstract
A new simple method to measure the spatial distribution of the electric fie ld in the plasma sheath is proposed. The method is based on the experimenta l investigation of vertical oscillations of a single particle in the sheath of a low-pressure radio-frequency discharge. It is shown that the oscillat ions become strongly nonlinear as the amplitude increases. The theory of an harmonic oscillations provides a good quantitative description of the data and gives estimates for the first two anharmonic terms in an expansion of t he sheath potential around the particle equilibrium.