Fabricating well-aligned carbon nanotubes, especially, on a silicon substra
te is very important for their applications. In this paper, an aligned carb
on nanotube array has been prepared by pyrolysis of hydrocarbons catalyzed
by nickel nanoparticles embedded in porous silicon (PS) templates. High-mag
nification transmission electron microscopy images confirm that the nanotub
es are well graphitized. The PS substrates with pore sizes between 10 and 1
00 nm play a control role on the growth of carbon nanotubes and the diamete
rs of the tubes increase with the enlargement of the pores of the substrate
s. However, such a control role cannot be found in the macro-PS substrates.