Effect of surface impurities on the Cu/Ta interface

Auger electron spectroscopy and temperature programmed desorption studies u nder ultra-high vacuum conditions demonstrate that even sub-monolayer cover ages of oxygen or carbide on polycrystalline Ta significantly degrade the s trength of Cu/Ta chemical interactions, and affect the kinetics of Cu diffu sion into hulk Ta. On clean Ta, monolayer coverages of Cu will de-wet only above 600 K. A partial monolayer of adsorbed oxygen (3 L O-2 at 300 K) resu lts in a lowering of the de-wetting temperature to 500 K, while saturation oxygen coverage (10 L O-2, 300 K) results in de-wetting at 300 K. Carbide f ormation also lowers the de-wetting temperature to 300 K. Diffusion of Cu i nto the Ta substrate at 1100 K occurs only after a 5-min induction period a t this temperature. This induction period increases to 10 min for partially oxidized Ta, 15 min for carbidic Ta and 20 min for fully oxidized Ta. (C) 2000 Elsevier Science S.A. All rights reserved.