Focusing efficiency of a multilayer Fresnel zone plate for hard X-ray fabricated by DC sputtering deposition

A hard X-ray microbeam with submicrometer spot size from third-generation h igh brilliance synchrotron radiation (SR) sources is expected to be a power ful tool for various fields of research. A Fresnel zone plate (FZP) is one of the promising, focusing elements for X-rays. Focusing efficiency is one of the important features of the FZP. In order to fabricate an FZP with a h igh focusing efficiency, it is necessary to investigate the relation betwee n the experimental values of the focusing efficiency and the theoretical on es. We have fabricated Ag/C and Cu/Al multilayer (sputtered-sliced) FZPs fo r use in hard X-ray region, and have compared the measured focusing efficie ncy data with the calculated ones. The experimental data have been in good agreement with the theoretical values. (C) 2000 Elsevier Science Ltd. All r ights reserved.