Effect of microwave ferrite on the density distribution of microwave-superposed inductively coupled plasma

Inductively coupled plasma (ICP) to which microwaves are superposed produce s better characteristics for both density and uniformity than other convent ional high-density plasma (HDP) sources. However, the uniformity of the pla sma is not adequate yet. So, we propose an approach to improve the plasma u niformity by putting microwave Ferrite around the ICP plasma and superposin g microwaves to it. The results suggest that the vertical and horizontal di stributions of the plasma are improved by optimizing the relations between the location of microwave ferrite and the microwave introducing techniques. (C) 2000 Elsevier Science Ltd. All rights reserved.