S. Okuji et al., Effect of microwave ferrite on the density distribution of microwave-superposed inductively coupled plasma, VACUUM, 59(2-3), 2000, pp. 686-692
Inductively coupled plasma (ICP) to which microwaves are superposed produce
s better characteristics for both density and uniformity than other convent
ional high-density plasma (HDP) sources. However, the uniformity of the pla
sma is not adequate yet. So, we propose an approach to improve the plasma u
niformity by putting microwave Ferrite around the ICP plasma and superposin
g microwaves to it. The results suggest that the vertical and horizontal di
stributions of the plasma are improved by optimizing the relations between
the location of microwave ferrite and the microwave introducing techniques.
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