PERFORMANCE OF HIGH-DENSITY CAST SILICON-CARBIDE IN THE EXTREME-ULTRAVIOLET

Authors
KESKIKUHA RAM FLEETWOOD CM ROBICHAUD J
Citation
Ram. Keskikuha et al., PERFORMANCE OF HIGH-DENSITY CAST SILICON-CARBIDE IN THE EXTREME-ULTRAVIOLET, Applied optics, 36(19), 1997, pp. 4409-4410
Citations number
9
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
36
Issue
19
Year of publication
1997
Pages
4409 - 4410
Database
ISI
SICI code
0003-6935(1997)36:19<4409:POHCSI>2.0.ZU;2-P
Abstract
The normal-incidence reflectance of high-density cast silicon carbide (SiC) is evaluated in the extreme ultraviolet (EUV) spectral region. H igh reflectivity in the EUV is achieved. High reflectivity and the rel atively low-cost manufacturing process make high-density cast SiC a pr omising mirror material for EUV applications.